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IUPAC - ion microscopy (I03221)

ion microscopy

Use of the secondary ion @M03746@ (SIMS) technique to obtain micrographs of the elemental (or isotopic) distribution at the surface of a sample with a spatial resolution of \(2\ \unicode[Times]{x3BC}\text{m}\) or better.
Orange Book, 2nd ed., p. 249 [Terms] [Book]